,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,@id,rdf:type,rdfs:label,skos:notation 0,,,,,,,75,,,,,,,Dust div2 surf. layer resist (s/m),000000000000000000000001000080,-99,-99,-99,-99,-99,-99,-99,-99,-99,-99,0,,,,,0,,3,,,0,0,00000000000100000001,,skos:Concept|,Dust div2 surf. layer resist (s/m),m01s03i075