,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,@id,@notation,@status,rdf:type,rdfs:label,skos:notation 0,,,,,,,74,,,,,,,Dust div1 surf. layer resist (s/m),000000000000000000000001000080,-99,-99,-99,-99,-99,-99,-99,-99,-99,-99,0,,,,,0,,3,,,0,0,00000000000110000001,,m01s03i074,stable,skos:Concept|,Dust div1 surf. layer resist (s/m),m01s03i074